Laboratory Introduction

The Hybrid Thin Film Process Research Laboratory utilizes advanced vapor deposition technologies such as PVD, CVD, and ALD to study the thin film formation of various materials, including semiconductors, conductive polymers, perovskites, and metal-organic frameworks (MOFs). By applying these processes to diverse fields such as semiconductor devices, optical sensors, gas sensors, biosensors, and solid-state batteries, the lab is developing devices with excellent stability and performance, with the goal of creating innovative devices that integrate new functionalities.

Research Areas

• Thin film process for semiconductor
• CVD based polymer thin film
• Thin film based Interface engineering for solid-state-batteries
• Semiconductor based photodetectors/Gas sensors/Biosensors

Research Activities

• Fabrication of stacked optical devices based on back-to-back diodes for realizing vehicle image sensors / Monolithic Perovskite–Silicon Dual-Band Photodetector for Efficient Spectral Light Discrimination, Advanced Science (2024)
• Pioneer suggesting the concept of a multifunctional logic gate based on optical diodes / Perovskite multifunctional logic gates via bipolar photoresponse of single photodetector, Nature Communications (2022)
• Manufacturing PEDOT polymer thin films based on CVD for realizing wearable devices onto conventional fabrics / Binder-free printed PEDOT wearable sensors on everyday fabrics using oxidative chemical vapor deposition, Science Advances (2021)